Standard inspection microscopes for up to 6-in. wafers integrate the CF
Infinity Corrected Optical System with a rigid frame. The OPTIPHOT 150
series is equipped with Nikon's CF Infinity Corrected Optical System, the
new Universal Epi-illuminator 10 for pinhole illumination, brightfield,
darkfield, DIC (Differential Interference Contrast), and epi-fluorescence
observations, and a rigid frame that was designed using CAE structural
analysis. The OPTIPHOT 150 series offers superior high-magnification observation
compared with conventional microscopes and enables inspection of highly
integrated wafers.
Click here to view accessories for the Optiphot 150: | Accessories
|
Click here for Digital Cameras to Couple with microscope: | Digital
Imaging |
For more information, call Capra at (508) 650-9700.
Click here for diagram: | Optiphot 150
|
Click here for another diagram: | Optiphot
150 |
| Optiphot 150 | |
| Magnification | 40x ~ 2,250x for observation |
| Eyepiece tube | UWTTL, TTL, TI, BT, BI, UWTT |
| Eyepieces | CFUWL 10x, CFWN 8x, CFWN 10x, CFWN 10xM, CFWN D10x, CFWN D10xM, CFWN 12.5x, CFWN 15x |
| Epi-Illuminator | Universal Epi-illuminator 10 |
| Diascopic Illuminator | Not Provided |
| Nosepiece | Motorized Universal Quintuple Nosepiece
BD Quintuple Nosepiece EPI Quintuple Nosepiece |
| Objectives | CF Plan EPI
CF Plan EPI ELWD CF Plan EPI SLWD CF Plan Apo EPI CF LCD Plan CR CF Plan BD ELWD CF Plan Apo BD CF Plan BD DIC CF Plan BD ELWD DIC |
| Focusing Mechanism | Stroke 32mm
Coarse Focusing 5.2mm/rotation Fine Focusing 0.1mm/rotation |
| Stage | 6 x 6 Stage
156 x 154mm Manual lever provided 3 ~ 6 in. |
| Remote Keypad | Motorized nosepiece rotation buttons
Light balancing switch Light intensity volume |
| Weight (approx.) | 22kg (48 lbs)
(with TI and 6 x 6 stage) |
| Power Supply | 100-120V AV +-10% 50/60Hz
220-240V AC +- 10% 50/60Hz |