Eclipse L150/150A


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Superb images, thanks to CFI60 infinity optics, in addition to a compact design

Although the Eclipse L150 and L150A are capable of handling up to 6-inch wafers, they boast the smallest footprint for microscopes in their class. And thanks to CFI60 infinity optics, these microscopes produce superb images with excellent contrast and minimum flare. For greater protection from contamination, the L150A comes with a motorized nosepiece. 
  L150  L150A 
CFI60 infinity optics
The L150/L150A microscopes adopt CFI60 objectives that combine Nikon's renowned CF design with infinity optics. These new optics provide longer working distances and high N.A.'s, while producing images that are crisp and clear with high contrast and minimal flare. In particular, images under darkfield microscopy have a brightness and contrast never possible before. The longer working distances provided by CFI60 objectives are particularly useful when inspecting magnetic heads and other thick samples. 
Compact design 

image The L150 and L150A feature extremely compact 6-inch stages and have the smallest footprint for microscopes in their class. 

*The footprint is 30% smaller than conventional models. 

L150 equipped with L-S6
6"x6" stage ESD 
Conventional model
equipped with 6"x6" stage
Total ESD design 

The parts of the L150 that are touched by the operator--including not only the painted surfaces, but eyepieces, illuminator, and controls--are ESD (Electrostatic Discharge)-applied. This design prevents damage to magnetic heads, resulting in an increase in yield. It also prevents foreign particles from adhering to the microscope body, providing greater safeguards against contamination when inspecting magnetic heads and semiconductor samples. 
SEMI S2-0200/S8-0600-compliant, ergonomic design 
All controls are positioned up-front in the microscope base to minimize operator hand movement, while the eyepoint is set at the optimum level to ensure comfortable observation and operation. A refocusing mechanism also prevents the objective from hitting the sample. 
L150/L150A  Conventional model
image image
All controls are positioned up-front. 
To switch to coarse movement, simply pinch the two pins, allowing you to move the stage manually.
Robust, vibration-resistant construction 

A design using computer-aided engineering (CAE) has created a microscope body where the guide is located close to the optical path, making these instruments highly resistant to vibrations. 
Advanced epi-illuminator 

With sufficient brightness provided by the 12V-100W lamphouse, the universal epi-illuminator can be used for brightfield, darkfield, Nomarski DIC, and qualitative polarizing observations. A new diaphragm mechanism eliminates manual settings of the aperture and field diaphragms when you switch from brightfield observation to darkfield or vice versa, streamlining your inspection. For even greater brightness, a metal halide lamphouse can be used in addition to mercury and xenon lamphouses. 
Versatile observation techniques 

Brightfield, darkfield, Nomarski DIC, epi-fluorescence, and simple polarizing techniques are all possible with these microscopes 
Motorized nosepiece with software control (L150A)

The L150A comes standard with a fixed-motorized quintuple nosepiece that can be controlled by software to stop precisely at each objective position. When the nosepiece is rotated, illumination is attenuated momentarily to protect the operator's eyes. 
Motorized nosepiece Objective changeover switch
Motorized nosepiece  Objective changeover switch 

Key Features Include
         CFI Infinity Optics -- With a 60mm parfocal distance and larger objective diameter, the Nikon's CFI60 optics provide both longer working distances and higher numerical apertures. The results of this remarkable technology are extremely sharp, high contrast images with a minimum of flare.

         Flexible Epi-Illuminator for Reflected Light -- The Universal Epi-Illuminator with 12V/100W halogen lamp ensures bright images whatever observation technique you use - brightfield, darkfield, Nomarski DIC or qualitative polarizing observations. For applications requiring additional illumination, mercury, xenon and metal halide light source options are also available.

 Small Footprint -- Nikon has designed these microscopes with the smallest footprint for microscopes in their class. This saves valuable space in the lab or fab. Extremely compact 6 inch (150mm) stages are available as a further space saving measure.

         Robust, Flexible Design -- Using CAE (Computer Aided Engineering), the microscope body has been made to withstand the weight of a full complement of accessories without any deterioration in image sharpness due to vibration.

         ESD (Electro Static Discharge) Design -- The L150 features a total ESD design. On the L150 and L150A stands, the elimination of static prevents foreign particles from adhering to the microscope body, providing greater safeguards against contamination. With the L150, all parts that the operator comes in contact with are ESD, making the microscope ideal for the inspection of static sensitive components, such as magnetic heads (GMRs, etc.).

        Optional Spacers -- The base and arm sections of these microscopes can be separated so that the user can add spacers for the observation of thick samples up to 78mm.

        Motorized Nosepiece -- The L150A comes standard with a fixed-motorized quintuple nosepiece. Internal software assures that the nosepiece stops precisely at each objective position. Nosepiece controls are located below the stage to prevent contamination, by eliminating the need to place hands in or near the stage area.

        SEMI S2-0200/S8-0600 Compliant -- All controls are up-front in the microscope base to minimize operator hand movement and the eyepoint is set at the optimum level to ensure comfortable observation. A refocusing mechanism also prevents the objective from hitting the sample.

Technical Specifications
        Optical System: CFI60 (infinity optical system) Parfocal distance : 60mm

        Eyepiece tube (F.O.V./observation port: photo port): Y-TB Binocular Tube B, F.O.V. 22mm; Y-TE Ergonomic Binocular Tube, F.O.V. 22mm, tilting angle 8 degrees - 32 degrees and telescopic mechenism movement + 15mm; Y-TF Trinocular Tube FUW, F.O.V. 22/25mm, 100:0, 0:100, Reticle rotation compensation provided; Y-TT Trinocular Tube TUW, F.O.V. 22/25mm, 100:0, 20:80, 0:100, Reticle roatation compensation provided; L-T12 Trinocular Eyepiece Tube ESD (erect image), F.O.V. 22/25mm, 100:0, 0:100; Y-IER Eyelevel Riser (thickness 25mm), for adjustment of eyelevel (up to 50mm)

        Eyepiece : L-W10x ESD (F.O.V. 22mm); 10x (F.O.V. 22mm); 10xM photo mask (F.O.V. 22mm); 10x CM crossline (F.O.V. 22mm); 12.5x (F.O.V. 16mm); 15x (F.O.V. 14.5mm); UW 10x (F.O.V. 25mm); 10xM photo mask (F.O.V. 25mm)

         Episcopic Illumination: Universal Epi-Illuminator ESD with 12V/100W halogen lamp (Light source built-in); (For BF/DF/DIC (option), qualitative polarizing obersvations); Centerable Field Diaphragm, Aperture Diaphragm, (Both are synchronized with B/D changeover); Four 25mm filters (NCB11/ND4/ND16/GIF) can be mounted; Optional High Intensity Illuminators available (100W Mercury, 75W Xenon, 150W Metal Halide)

        Nosepiece: C-N Sextuple Nosepiece; L-NBD5 BD Quintuple Nosepiece ESD; L-NU5 Universal Quintuple Nosepiece ESD; L-NI5A Motorized Universal Quintuple Nosepiece, fixed to L150A Stand

        Objectives: CFI LU/L Plan series

        Focusing mechanism; Coarse focusing; Fine focusing: Stroke - 30mm; 12.7mm per rotation (torque adjustable, refocusing mechanism provided; 0.1mm per rotation (in 1um increments)

         Guide : 2-guide

        Stage: L-S6 6 x 6 Stage ESD (L150A/L150), Cross travel 150 x 150mm, with ESD plate or 6" wafer holder; 6 x 4 Stage - adapter required, with glass plate Y-SR2 3 x 2 Rectangular Mechanical Stage R2 - adapter required, Cross Travel 78 x 54mm, metal holder optional ; 4 x 4 Stage with Glass Plate - adapter required, Cross travel 100 x 100mm, glass stage, diascopic observation possible; Circular Graduated Stage G - adapter required, Stage diameter: 190mm, rotation 360 degrees, vernier reading

        Intermediate Tube Accessories: Double Port, Epi-Fluorescence Attachment, Teaching Head

         Dimensions (mm) and Weight: 397(W) x 581(D) x 487(H) (eye-level), 20 kg. (with L-T12, 6 x 6 stage, BD)

        Power supply: AC 100-240V 2.4A 50/60Hz ±10%

        10V Less than 0.2 sec


For more information, call Capra at (508) 650-9700.

Capra Optical, Inc.
Telephone: (508) 650-9700