- DC Servo Motor control, 150-mm/sec-stage speed with 3020 and
300 mm/sec with 6555.
- New Telecentric 15:1 zoom optical system with 0.3 numerical
aperture and 25 millimeter working distance.
- New dual ring programmable oblique LED illuminators, each ring
has 8 independent segments.
- Improved stage accuracy with new design lower coefficient of
expansion scales with 0.1-micron resolution.
- More stringent stage accuracy specifications, all stages are
U2 compliant.
- High accuracy, high speed through the lens Laser with 8-micron
spot size. Scans a 1000 points a second and has a 25-millimeter working
distance
- Faster image acquisition and improved system speed with a progressive
scan black and white camera.
- New separate system controller with all electronics along with
halogen episcopic and diascopic illumination built in. This removes heat
source and vibration from fan illuminators from main stand.
- High-speed local area network connection (LAN) between the
system controller and the computer improves program run time along with
improved laser and video auto focus performance.
- New 300 by 200 millimeter steel stage on VMR-3020 with ball
screw design cross roller bearing guides. (Fast, Accurate, Durable)
- New VMR Automeasure software includes CAD Reader, Offline Programming,
Profiling Software, and Programming Wizards. (All standard)
- Improved measuring accuracy with New Patented High Accuracy
edge probes developed by Nikon.
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- Stroke (Xx Yy Zz) Standard: 650 x 550 x 150 mm (25.6 x 21.7x
5.9) in.
- Minimum readout: 0.1mm
- Maximum work piece weight: 30kg (66.1lb.)
- Measuring accuracy at 20C+/-0.5K:
- U1x U1y: ''1.5 + 4L/1000 mm Max Work Piece 30kg
- U2xy (Standard): '2.5 + 4L/1000 mm Max Work Piece 30kg
- Z-axis guide accuracy: (1.5+L/150) mm
- Camera: B/W Progressive Scan camera or color CCD camera
- Maximum specimen height (Standard): 105mm
- Zoom Head Magnification and Field of View: Type 1: 0.5- 7.5x,
9.33 x 7.00mm - 0.622 x 0.467mm; Type 2: 1- 15x, 4.67 x 3.50mm - 0.311x
0.233mm; Type 3: 2 - 30x, 2.33 x 1.75mm - 0.155 x 0.117mm
- Auto Focus: (TTL) Through the lens laser and video auto focus
- Power Source: AC 100 to 240 V+/- 10%, 50/60 Hz
- Power Consumption: Approximately 9A
- Dimensions and Weight: Main Body Only:
1220(W) x 1680(D) x 1750(H) mm, 600kg; 48.0(W) x 66.1(D) x 68.9(H) in.,
1322.8lb Main Body & Table: 690(W) x 730(D) x 1725(H)
mm, 200kg; 27.2(W) x 28.8(D) x 67.9(H) in., 440.9lb Controller:
250(W) x 550(D) x 500(H) mm, 20kg; 9.8(W) x 21.7(D) x 19. (H) in., 44.1lb
Foot Print: 2400 (W) x 2000 (D) mm; 94.5 (W) x 78.7
(D) in.
- Host Computer: Main unit: IBM PC/AT compatible
(Windows® 2000) CRT: 21-inch color
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