- Its 1000 x 800 mm stage travel is more than adequate to handle
large flat panels, shadow masks, etching sheets for lead frames, LCD's, mask
patterns, and other large work-pieces;
- 150mm Z-axis stroke;
- bright diascopic illumination.
- Pattern Recognition Mode finds features at increased speed and
with greater accuracy.
- Scanning measurement
- Monitoring in black and white or color.
- U2-compliant, higher accuracy systems available.
- User-selectable edge detection
- Versatile illumination system embodying TTL quadrant oblique
illumination for standard magnifications.
- Video edge detection through gray scale processing
- Vision Auto Focus, Laser AF, or TTL Laser AF.
- VM-1000N Non Contact Automated Measuring System
- CNC 10X high-speed zoom allowing for ultra-precision at high
magnifications as well as wide fields of view at low magnifications.
- Detection of low-contrast edges with greater precision - tiltable
fiber illuminator/quadrant ring fiber illumination capability.
- Easy, multi-window operation
- High magnification models available as standard option
- Intelligent search functions
- ISO-based result evaluation - detailed graphic display for roundness,
flatness, and straightness.
|
- Stroke (X x Y x Z): Standard 1000 x 800 x 150 mm (39.4 x 31.5
x 5.9 in.); High Magnification 1000 x 800 x 115 mm (39.4 x 31.5 x 4.5 in.)
- Z-axis guide accuracy: (3 + L/50)µm
- Host Computer: Main unit IBM PC/AT compatible (Windows® 2000);
CRT 21-inch color
- Maximum specimen height: Standard 135 mm, High Magnification
110 mm
- Auto focus: (Standard model/High magnification model I) Image
AF, Laser AF; (High magnification model II) Image AF, TTL Laser AF
- Measuring accuracy (X . Y): Standard U1XY- (3.5 + L/200)µm;
High Magnification U2XY- (3.5 + L/250)µm, High Magnification U1XY-
(2.5 + L/250)µm
- Field of view: (Standard) 10 x 8 to 1 x 0.8 mm, (High magnification
model I) 4 x 3.2 to 0.4 x 0.32 mm, (High magnification model II) 2 x 1.6
to 0.2 x 0.16 mm, (High magnification model III) 1 x 0.8 to 0.1 x 0.08 mm
- Minimum readout: 0.1 µm
- Dimensions (W x D x H) and weight (Main Body): 1,534 x 2,117
x 1,793 mm; 1,500kg (60.4 x 83.3 x 70.6 in; 3,306.9 lb.)
- Footprint (D x W): 2,600 x 2,300 mm (102.4 x 90.6 in.)
- Dimensions (W x D x H) and weight (Illuminator): 220 x 130 x
360mm; 7 kg (8.7 x 5.1 x 14.2 in. (15.4 lb.)
- Maximum work piece weight: 40kg (88.2 lb.)
- Zoom Magnification: 5-step zoom for all models: (Standard) 0.75X
to 7.5X, (High magnification model I) 1.875X t 18.75X, (High magnification
II) 3.75X to 37.5X, (High magnification III) 7.5X to 75X
- Power source: AC 100 to V ± 10%, 50/60 Hz
- Power consumption: Approx 18A
- Camera: B/W CCD or color CCD camera
|
The new NEXIV VMR series is set to become the standard by which all other
vision metrology systems are measured. Its brand new telecentric optic system
has been designed to make it the best in the world. An Objective lens with
a working distance of 50mm and the same superb numerical apertures found in
top-end microscopes are both standard features. The world's widest 15X -
zoom ratio provides ample field of view during low magnification observations
and excellent resolution at high magnifications. 